性能規格 |
Model | SNE-4500M Plus(A) | SNE-4500M Plus(B) | SNE-4500M | SNE-3000MS | SNE-3200M |
分辨率 | 5nm | 15nm |
倍率 | 150,000x | 100,000x | 60,000x |
接收器 | SE | SE/BSE | SE | SE/BSE |
真空度 | High | High/Low | High | High/Low |
操作軸 | X, Y, R,Z,T: Fully Motorized | X,Y,R,Z,T: Manual | X,Y,R: Manual |
規格 |
操作軸 | X, Y: 40mm Z: 0 ~ 40mm R : 360° T: -45 - 90° | X,Y :40mm R: 360° T:0-45° Z: 0-35mm | X, Y:35mm R : 360° |
樣品尺寸 | 80mm(D) / 50mm(H) | 80mm(D) / 35mm(H) | 70mm(D) / 30mm(H) |
相機 | Top-View Camera | - | - |
可變光柵 | 30,50,50,100|im(Variable Type) | 200nm(Single) |
電子束類型 | Pre-centered Tungsten Filament Cartridge |
加速電壓 | lkV ~ 30kV (1/ 5/ 10/15/ 20/ 30) - 6 Step |
顯示模式 | 320 x 240 / 640 x 480 / 1,280 x 960 / 2,560 x 1,920 / 5,120 x 3,840 |
自動功能 | Start, Focus, Stigmator, Contrast & Brightness |
圖像樣式 | BMP, JPEG, PNG, TIFF |
真空泵 | Rotary + Turbo Molecular Pump (Fully Automation System) |