| 型號 | PR300 | PR301 |
| 方式 | Barrel type of direct plasma |
| 控制部分 |
| 高頻電流功率 | Max. 300W (100W×3 chambers for PR300) |
| 頻率 | 13.56 MHz |
| 輸出阻抗電阻 | 50Ω |
| 調節方式 | Manual biaxial tuning method |
| Instrument | Output watt meter (0 to 300W) Reflected wave watt meter (0 to 100W) Vacuum gauge, bourdon's tube type Flow meter, needle valve integrated type, 1 set |
| 時間 | 0.1sec. to 999h |
| 輸入氣體管徑 | 1/4" stainless steel |
| 電源(50/60Hz) | AC 100/220V, single phase, 1 kVA |
| Reaction part |
| Reaction chamber | Made of pyrex glass, ?64×160mm×3 chambers | Made of pyrex glass, ?118×160mm x 1 chamber |
| Electrode structure | Condenser type, 2-way split |
| Control system | Auto pressure reduction, auto leak valve |
| Piping material | Stainless steel, Teflon, Copper and Brass | Stainless steel, Teflon |
| External dimensions(W×D×Hmm) | 438×520×556 | 438×520×630 |
| Weight | Approx. 38kg | Approx. 34kg |
| Standard Accessories |
| Vacuum grease :1 pc O-ring for reaction chamber :6 pcs.(for PR300) , 1pc. (for PR301) Sample dish (large and small) :each 1 set (for PR300 only)
|
| Optional Accessories |
| Vacuum Pump ｜Vacuum Hose｜ Rubber Tube｜ Adapter Center｜ Ring Clamp |
