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昆山熙日機械設備有限公司
昆山熙日機械設備有限公司
thyrcont圖拉特真空計VSH89DLVSH89DLVacuumTransducer●DN40CF-F●LCDdisplayThedigitalcombinationtransducerVSH(Pirani/hotcathode)measuresabsolutepressurefromatmosphericpressuretoultrahighvacuum
thyrcont圖拉特真空計VSH89DL 
The digital combination transducer VSH (Pirani/hot cathode) measures absolute pressure from atmospheric pressure to ultrahigh vacuum.
Microcontroller intelligence automatically manages the optional interplay of both vacuum sensors.
Smartline represents cutting edge technology providing safe, precise and cost effective process control.
描述
Wide range sensor Pirani / Bayard Alpert
Pirani with extended range allows operation of hot cathode at lower pressure and increases lifetime
Excellent accuracy and repeatability
Bayard-Alpert with blowing resistant, yttrium coated double filament, insensitive against inrush of air
Digital RS485 interface and analog output signal 1.219-8.6 V
Automatic baud rate detection 9.6 kBd to 115 kBd
Two independent, potential-free relay switch points
With large, integrated LCD display with background illumination
Easily replaceable sensor heads with stored calibration data
應用
Coating plants and vapor deposition
Sputtering plants
Analysis technology
Measuring and controlling in the fine and ultrahigh vacuum range
Vacuum furnaces
Process engineering
Space simulation chambers
技術參數
| WEIGHT | 0.555 kg |
|---|---|
| DIMENSIONS | 4.8 x 6.9 x 1.46 cm |
| MEASURING PRINCIPLE | Pirani / Bayard Alpert, depending on gas type |
| MATERIALS IN CONTACT WITH VACUUM | Stainl. steel 1.4307, Ni, W, Pl, yttrium coated iridium, glass |
| MEASUREMENT RANGE | 1000 – 5e-10 mbar (750 – 5e-10 Torr), max. overpressure 4 bar abs. |
| ACCURACY | 1000 – 10 mbar: < 30 % from reading 10 – 1e-8 mbar: < 10 % from reading |
| REPEATABILITY | ±2 % (10 – 1e-2 mbar), 5% (1e-2 – 1e-8 mbar) |
| RESPONSE TIME | < 200 ms (2 s while switching BA emission current) |
| EMISSION CURRENT | Automatic switching 10 µA, 100 µA, 1 mA, 2 mA |
| DEGAS | Ohmic heating of the anode |
| POWER SUPPLY | 20 – 30 VDC |
| ELECTRICAL CONNECTION | SubD 15pol., male, lockable |
| POWER CONSUMPTION | Max. 8 W, additional 1 W f. degas and 0.8 W f. EtherCAT/relays/LCD |
| OPERATING TEMPERATURE | +5…+60°C |
| STORAGE TEMPERATURE | -40…+65°C |
| MAX. BAKE OUT TEMPERATURE | 180°C at the flange (electronic detached) |
| OUTPUT SIGNAL | 0 – 10 VDC, measuring range 1.219 – 8.6 VDC, log., 0.6 V/decade load resistor > 10 kOhm |
| SERIAL INTERFACE | RS485: 9.6 kBd to 115 kBd, address switch 1 – 16 |
| SWITCH POINT | 2 switch-over relays, 50 VAC / 2 A, 30 VDC / 2 A, max. 60 VA |
| VACUUM CONNECTION | DN 40 CF-F |
| PROTECTION CLASS | IP40 |
vshe.pdf
man_vsh-de-en-171005-1.pdf
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